二手鲁道夫 RUDOLPH NSx-105 晶圆缺陷检测设备技术规格详解
RUDOLPH NSx-105 为 Wafer/Mask Macro Defect Inspection System(晶圆 / 掩模宏观缺陷检测机),适配 100mm-300mm 晶圆与 Film Frame 载膜基板,搭载 Linear motor drive inspection axis(直线电机扫描轴)&am…
2026/7/22 14:51:24