一起来探索SEMI标准Explore SEMI Standard文章来自“微著半导体系统”从标准到能力从能力到效率从效率到良率从良率到未来。SECS/GEM不止是通信更是设备的蜕变★详解【S1F13S1F14】 ★S1F13指令双向指令EQP发送给Host / Host发送给EQP请求建立GEM连接S1F13标准格式Stream,FunctionName(Mnemonic)DirectionS1,F13Establish Communications Request(CR)H-EDescriptionThe purpose of this message is to provide a formal means of initializing communications at a logical application level both on power-up and following a break in communications. It should be the following any period where host and Equipment SECS applications are unable to communicate. An attempt to send an Establish Communications Request (S1,F13) should be repeated at programmable intervals until an Establish Communications Acknowledge (S1,F14) is received within the transaction timeout period with an acknowledgement code accepting the establishment.StructureL,21.A MDLN2.A SOFTREV .ExceptionThe host sends a zero-length list to the equipment.MDLNModel Name——设备型号名称表示的是设备型号的名称。作用HostMES/EAP用来识别设备型号FAB 用来确认设备是否与MES派单的设备类型一致在 GEM300 中用于设备标识、流程绑定、验收记录在自动化测试中用于设备信息校验SOFTTRREVSoftware Revision——表示设备控制软件的版本号。可以用来指示当前的上位机软件版本号。“v1.0.3”“2024.12.01”“R3.5.7”S1F14指令双向指令EQP发送给Host / Host发送给EQP应答报文完成GEM协议的握手S1F14标准格式Stream,FunctionName(Mnemonic)DirectionS1,F14Establish Communications Acknowledge(CRA)H-EDescriptionAccept or deny Establish Communications Request (S1,F13). MDLN and SOFTREV are on-line data and are valid only if COMMACK0.StructureL,2B [1] COMMACKL,21.A MDLN2.A SOFTREV .ExceptionThe host sends a zero-length list for item 2 to the equipment.其中COMMACK0Accepted1Denied,Try again2-63 Reserved应用解读基于网络协议分层标准一定要理解HSMS是建立在TCP之上的应用层协议。而S1F13和S1F14指令是应用层指令对于GEM应用层来说SEMI标准规定了首先要建立TCP连接物理连接在此基础上通过S1F13和S1F14建立GEM应用层的连接逻辑连接。SEMI 标准原文有助于理解A communication link is established following the first successful completion of any one S1,F13/F 14 transaction with an acknowledgement of ‘accept’. The establishment of this link is logical rather than physical.在验证协议是否符合规范时需要验证在没有通过S1F13/F14建立通信前设备端是会丢弃任何SxFy消息的只会处理S1F13和S1F14指令。并且设备端也只能发送S9Fn,S1F13和S1F14指令。SEMI 标准原文有助于理解No messages other than S1,F13, S1,F14, and S9,Fx shall be sent while this substate is active. The equipment shall discard any messages received from the host other than S1,F13 or S1,F14 (Establish Communications Acknowledge). It shall also periodically attempt to establish communication with a host computer by issuing an S1,F13 until communications are successfully established. However, only one equipment-initiated S1,F13 transaction may be open at any time.对于SECS/GEM驱动开发者S1F13/F14作为GEM建立通讯的指令对其中S1F13携带的数据对于不同的设备上位机软件来说MDLN和SOFTREV参数应该要保持可配置。并且如果建立S1F13/F14失败时根据上位机的需求SECS/GEM通讯库应该要支持回复码的扩展定义。